µç×ÓÏÔ΢¾µÒѾ³ÉΪ±íÕ÷¸÷ÖÖ²ÄÁϵÄÓÐÁ¦¹¤¾ß¡£ ËüµÄ¶à¹¦ÄÜÐԺͼ«¸ßµÄ¿Õ¼ä·Ö±æÂÊʹÆä³ÉΪÐí¶àÓ¦ÓÃÖзdz£ÓмÛÖµµÄ¹¤¾ß¡£ ÆäÖУ¬Á½ÖÖÖ÷ÒªµÄµç×ÓÏÔ΢¾µÊÇ͸Éäµç×ÓÏÔ΢¾µ£¨TEM£©ºÍɨÃèµç×ÓÏÔ΢¾µ£¨SEM£©¡£
ɨÃèµç¾µºÍ͸Éäµç¾µµÄ¹¤×÷ÔÀí
´ÓÏàËÆµã¿ªÊ¼, ÕâÁ½ÖÖÉ豸¶¼Ê¹Óõç×ÓÀ´»ñÈ¡ÑùÆ·µÄͼÏñ¡£ ËûÃǵÄÖ÷Òª×é³É²¿·ÖÊÇÏàͬµÄ;
µç×ÓÔ´;
µç´ÅºÍ¾²µç͸¾µ¿ØÖƵç×ÓÊøµÄÐÎ×´ºÍ¹ì¼£;
¹âÀ»¡£
ËùÓÐÕâЩ×é¼þ¶¼´æÔÚÓÚ¸ßÕæ¿ÕÖС£
ÏÖÔÚתÏòÕâÁ½ÖÖÉ豸µÄ²îÒìÐÔ¡£ ɨÃèµç¾µ£¨SEM£©Ê¹ÓÃÒ»×éÌØ¶¨µÄÏßȦÒÔ¹âÕ¤ÑùʽɨÃèÑùÆ·²¢ÊÕ¼¯É¢ÉäµÄµç×Ó
¶øÍ¸Éäµç¾µ£¨TEM£©ÊÇʹÓÃ͸Éäµç×Ó£¬ÊÕ¼¯Í¸¹ýÑùÆ·µÄµç×Ó¡£ Òò´Ë£¬Í¸Éäµç¾µ£¨TEM£©ÌṩÁËÑùÆ·µÄÄÚ²¿½á¹¹£¬Èç¾§Ìå½á¹¹£¬ÐÎ̬ºÍÓ¦Á¦×´Ì¬ÐÅÏ¢£¬¶øÉ¨Ãèµç¾µ£¨SEM£©ÔòÌṩÁËÑùÆ·±íÃæ¼°Æä×é³ÉµÄÐÅÏ¢¡£
¶øÇÒ£¬ÕâÁ½ÖÖÉ豸×îÃ÷ÏԵIJî±ðÖ®Ò»ÊÇËüÃÇ¿ÉÒÔ´ïµ½µÄ×î¼Ñ¿Õ¼ä·Ö±æÂÊ; ɨÃèµç¾µ£¨SEM£©µÄ·Ö±æÂʱ»ÏÞÖÆÔÚ?0.5nm£¬¶øËæ×Å×î½üÔÚÇò²îУÕý͸Éäµç¾µ£¨TEM£©Öеķ¢Õ¹£¬ÒѾ±¨µÀÁËÆä¿Õ¼ä·Ö±æÂÊÉõÖÁСÓÚ50pm¡£
ÄÄÖÖµç×ÓÏÔ΢¾µ¼¼Êõ×îÊʺϲÙ×÷Ô±½øÐзÖÎö£¿
ÕâÍêȫȡ¾öÓÚ²Ù×÷Ô±ÏëÒªÖ´ÐеķÖÎöÀàÐÍ¡£ ÀýÈ磬Èç¹û²Ù×÷Ô±Ïë»ñÈ¡ÑùÆ·µÄ±íÃæÐÅÏ¢£¬Èç´Ö²Ú¶È»òÎÛȾÎï¼ì²â£¬ÔòӦѡÔñɨÃèµç¾µ£¨SEM£©¡£ ÁíÒ»·½Ã棬Èç¹û²Ù×÷Ô±ÏëÖªµÀÑùÆ·µÄ¾§Ìå½á¹¹ÊÇʲô£¬»òÕßÏëѰÕÒ¿ÉÄÜ´æÔڵĽṹȱÏÝ»òÔÓÖÊ£¬ÄÇôʹÓÃ͸Éäµç¾µ£¨TEM£©ÊÇΨһµÄ·½·¨¡£
ɨÃèµç¾µ£¨SEM£©ÌṩÑùÆ·±íÃæµÄ3DͼÏñ£¬¶øÍ¸Éäµç¾µ£¨TEM£©Í¼ÏñÊÇÑùÆ·µÄ2DͶӰ£¬ÕâÔÚijЩÇé¿öÏÂʹ²Ù×÷Ô±¶Ô½á¹ûµÄ½âÊ͸ü¼ÓÀ§ÄÑ¡£
ÓÉÓÚ͸Éäµç×ÓµÄÒªÇó£¬Í¸Éäµç¾µ£¨TEM£©µÄÑùÆ·±ØÐë·Ç³£±¡£¬Í¨³£µÍÓÚ150nm£¬²¢ÇÒÔÚÐèÒª¸ß·Ö±æÂʳÉÏñµÄÇé¿öÏ£¬ÉõÖÁÐèÒªµÍÓÚ30nm£¬¶ø¶ÔÓÚɨÃèµç¾µ£¨SEM£©³ÉÏñ£¬Ã»ÓÐÕâÑùµÄÌØ¶¨ÒªÇó¡£
Õâ½ÒʾÁËÕâÁ½ÖÖÉ豸֮¼äµÄÁíÒ»¸öÖ÷Òª²î±ð£ºÑùÆ·ÖÆ±¸¡£É¨Ãèµç¾µ£¨ SEM£©µÄÑùÆ·ºÜÉÙÐèÒª»ò²»ÐèÒª½øÐÐÑùÆ·ÖÆ±¸£¬²¢ÇÒ¿ÉÒÔͨ¹ý½«ËüÃǰ²×°ÔÚÑùÆ·±ÉÏÖ±½Ó³ÉÏñ¡£
Ïà±È֮ϣ¬Í¸Éäµç¾µ£¨TEM£©µÄÑùÆ·ÖÆ±¸ÊÇÒ»¸öÏ൱¸´ÔӺͷ±ËöµÄ¹ý³Ì£¬Ö»Óо¹ýÅàѵºÍÓоÑéµÄÓû§²ÅÄܳɹ¦Íê³É¡£ ÑùÆ·ÐèÒª·Ç³£±¡£¬¾¡¿ÉÄÜÆ½Ì¹£¬²¢ÇÒÖÆ±¸¼¼Êõ²»Ó¦¶ÔÑùÆ·²úÉúÈκÎαÏñ£¨ÀýÈç³Áµí»ò·Ç¾§»¯ £©¡£ ĿǰÒѾ¿ª·¢ÁËÐí¶à·½·¨£¬°üÀ¨µçÅ׹⣬»úеÅ×¹âºÍ¾Û½¹Àë×ÓÊø¿ÌÊ´¡£ רÓøñÕ¤ºÍÖ§¼ÜÓÃÓÚ°²×°Í¸Éäµç¾µ£¨TEM£©ÑùÆ·¡£
SEM vs TEM£º²Ù×÷ÉϵIJîÒì
ÕâÁ½ÖÖµç×ÓÏÔ΢¾µÏµÍ³ÔÚ²Ù×÷·½Ê½ÉÏÒ²ÓÐËù²»Í¬¡£ ɨÃèµç¾µ£¨SEM£©Í¨³£Ê¹ÓÃ15kVÒÔÉϵļÓËÙµçѹ£¬¶øÍ¸Éäµç¾µ£¨TEM£©¿ÉÒÔ½«ÆäÉèÖÃÔÚ60-300kVµÄ·¶Î§ÄÚ¡£
ÓëɨÃèµç¾µ£¨SEM£©Ïà±È£¬Í¸Éäµç¾µ£¨TEM£©ÌṩµÄ·Å´ó±¶ÊýÒ²Ï൱¸ß£ºÍ¸Éäµç¾µ£¨TEM£©¿ÉÒÔ½«ÑùÆ··Å´ó5000Íò±¶ÒÔÉÏ£¬¶ø¶ÔÓÚɨÃèµç¾µ£¨SEM£©À´Ëµ£¬ÏÞÖÆÔÚ1-2°ÙÍò±¶Ö®¼ä¡£
È»¶ø£¬É¨Ãèµç¾µ£¨SEM£©¿ÉÒÔʵÏÖµÄ×î´óÊÓ³¡£¨FOV£©Ô¶´óÓÚ͸Éäµç¾µ£¨TEM£©£¬Óû§¿ÉÒÔÖ»¶ÔÑùÆ·µÄһС²¿·Ö½øÐгÉÏñ¡£ ͬÑù£¬É¨Ãèµç¾µ£¨SEM£©ÏµÍ³µÄ¾°ÉîÒ²Ô¶¸ßÓÚ͸Éäµç¾µ£¨TEM£©ÏµÍ³¡£
ÁíÍ⣬ÔÚÁ½¸öϵͳÖд´½¨Í¼ÏñµÄ·½Ê½Ò²ÊDz»Í¬µÄ¡£ ÔÚɨÃèµç¾µÖУ¬ÑùƷλÓÚµç×Ó¹âѧϵͳµÄµ×²¿£¬É¢Éäµç×Ó£¨±³É¢Éä»ò¶þ´Î£©±»µç×Ó̽²âÆ÷²¶»ñ£¬ È»ºóʹÓùâµç±¶Ôö¹Ü½«¸ÃÐźÅת»»³ÉµçÐźţ¬¸ÃµçÐźű»·Å´ó²¢ÔÚÆÁÄ»ÉϲúÉúͼÏñ¡£
ÔÚ͸Éäµç¾µ£¨TEM£©ÖУ¬ÑùƷλÓÚµç×Ó¹âѧϵͳµÄÖв¿¡£ ÈëÉäµç×Ó´©¹ýËü£¬²¢Í¨¹ýÑùÆ·Ï·½µÄ͸¾µ£¨Öмä͸¾µºÍͶӰ͸¾µ£©£¬Í¼ÏñÖ±½ÓÏÔʾÔÚÓ«¹âÆÁÉÏ»òͨ¹ýµçºÉñîºÏÆ÷¼þ£¨CCD£©Ïà»úÏÔʾÔÚPCÆÁÄ»ÉÏ¡£
±íI£ºÉ¨Ãèµç¾µ£¨SEM£©ºÍ͸Éäµç¾µ£¨TEM£©Ö®¼äÖ÷Òª²îÒìµÄ×ܽá
Ò»°ãÀ´Ëµ£¬Í¸Éäµç¾µ£¨TEM£©µÄ²Ù×÷¸üΪ¸´ÔÓ¡£ ͸Éäµç¾µ£¨TEM£©µÄÓû§ÐèÒª¾¹ýÇ¿»¯Åàѵ²ÅÄܲÙ×÷É豸¡£ ÔÚÿ´ÎʹÓÃ֮ǰÐèÒªÖ´ÐÐÌØÊâ³ÌÐò£¬°üÀ¨¼¸¸ö²½ÖèÒÔÈ·±£µç×ÓÊøÍêÃÀ¶ÔÖС£ ÔÚ±íIÖУ¬Äú¿ÉÒÔ¿´µ½É¨Ãèµç¾µ£¨SEM£©ºÍ͸Éäµç¾µ£¨TEM£©Ö®¼äÖ÷񻂿±ðµÄ×ܽᡣ
½áºÏSEMºÍTEM¼¼Êõ
»¹ÓÐÒ»ÖÖµç×ÓÏÔ΢¾µ¼¼Êõ±»Ìá¼°£¬ËüÊÇ͸Éäµç¾µ£¨TEM£©ºÍɨÃèµç¾µ£¨SEM£©µÄ½áºÏ£¬¼´É¨Ãè͸Éäµç¾µ£¨STEM£©¡£ Èç½ñ£¬´ó¶àÊý͸Éäµç¾µ£¨TEM£©¿ÉÒÔÇл»µ½“STEMģʽ”£¬Óû§Ö»ÐèÒª¸Ä±äÆä¶Ô×¼³ÌÐò¡£ ÔÚɨÃè͸Éäµç¾µ£¨STEM£©Ä£Ê½Ï£¬¹âÊø±»¾«È·¾Û½¹²¢É¨ÃèÑùÆ·ÇøÓò£¨ÈçSEM£©£¬¶øÍ¼ÏñÓÉ͸Éäµç×Ó²úÉú£¨ÈçTEM£©¡£
ÔÚɨÃè͸Éäµç¾µ£¨STEM£©Ä£Ê½Ï¹¤×÷ʱ£¬Óû§¿ÉÒÔÀûÓÃÕâÁ½ÖÖ¼¼ÊõµÄ¹¦ÄÜ; ËûÃÇ¿ÉÒÔÔڸ߷ֱæÂÊÏÈ¿´µ½ÑùÆ·µÄÄÚ²¿½á¹¹£¨ÉõÖÁ¸ßÓÚ͸Éäµç¾µTEM·Ö±æÂÊ£©£¬µ«Ò²¿ÉÒÔʹÓÃÆäËûÐźţ¬ÈçXÉäÏߺ͵ç×ÓÄÜÁ¿ËðʧÆ×¡£ ÕâЩÐźſÉÓÃÓÚÄÜÁ¿É«É¢XÉäÏß¹âÆ×£¨EDX£©ºÍµç×ÓÄÜÁ¿Ëðʧ¹âÆ×£¨EELS£©¡£
µ±È»£¬EDXÄܯ׷ÖÎöÔÚɨÃèµç¾µ£¨SEM£©ÏµÍ³ÖÐÒ²Êdz£¼û·ÖÎö·½·¨£¬²¢ÓÃÓÚͨ¹ý¼ì²âÑùÆ·±»µç×Óײ»÷ʱ·¢ÉäµÄXÉäÏßÀ´Ê¶±ðÑùÆ·µÄ³É·Ö¡£
µç×ÓÄÜÁ¿Ëðʧ¹âÆ×£¨EELS£©Ö»ÄÜÔÚÒÔɨÃè͸Éäµç¾µ£¨STEM£©Ä£Ê½¹¤×÷µÄ͸Éäµç¾µ£¨TEM£©ÏµÍ³ÖÐʵÏÖ£¬²¢Äܹ»·´Ó¦²ÄÁϵÄÔ×Ӻͻ¯Ñ§³É·Ö£¬µç×ÓÐÔÖÊÒÔ¼°¾Ö²¿ºñ¶È²âÁ¿¡£
ÔÚSEMºÍTEMÖ®¼ä×ö³öÑ¡Ôñ
´ÓËùÌáµ½µÄÒ»ÇÐÀ´¿´£¬ÏÔȻûÓГ¸üºÃ”µÄ¼¼Êõ; ÕâÍêȫȡ¾öÓÚÐèÒªµÄ·ÖÎöÀàÐÍ¡£ µ±Óû§ÏëÒª´ÓÑùÆ·ÄÚ²¿½á¹¹»ñµÃÐÅϢʱ£¬Í¸Éäµç¾µ£¨TEM£©ÊÇ×î¼ÑµÄÑ¡Ôñ£¬¶øµ±ÐèÒªÑùÆ·±íÃæÐÅϢʱ£¬É¨Ãèµç¾µ£¨SEM£©ÊÇÊ×Ñ¡¡£ µ±È»£¬Ö÷Òª¾ö¶¨ÒòËØÊÇÁ½¸öϵͳ֮¼äµÄ¾Þ´ó¼Û¸ñ²îÒ죬ÒÔ¼°Ò×ÓÃÐÔ¡£ ͸Éäµç¾µ£¨TEM£©¿ÉÒÔΪÓû§Ìṩ¸ü¶àµÄ·Ö±æÄÜÁ¦ºÍ¶à¹¦ÄÜÐÔ£¬µ«ÊÇËüÃDZÈɨÃèµç¾µ£¨SEM£©¸ü°º¹óÇÒÌåÐͽϴó£¬ÐèÒª¸ü¶à²Ù×÷¼¼Çɺ͸´ÔÓµÄǰÆÚÖÆÑù×¼±¸²ÅÄÜ»ñµÃÂúÒâµÄ½á¹û¡£
ÉùÃ÷£ºÓÅÖÊÄÚÈݹóÔÚÓë´ó¼Ò¹²Ïí£¬²¿·ÖÎÄÕÂÀ´Ô´ÓÚÍøÂ磬ÈçÓÐÇÖȨÇë¸æÖª£¬ÎÒÃÇ»áÔÚµÚһʱ¼ä´¦Àí¡£ºÏ×÷½»Á÷Çë¼Ó΢ÐÅ